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| 柔性电阻式压力传感器的制备及其性能检测研究与应用
摘要
近些年来，随着可穿戴式电子设备的快速发展，电子传感器作为其必不可少的部件之一，正处在国内外研究的焦点方向，未来各种高性能电子传感器的开发将如雨后春笋。其中柔性压力传感器与传统刚性传感器相比，具有轻重量，便于携带以及延展性高等特点，另外柔性压力传感器在人体运动检测、电子皮肤、智能制造以及人机交互等方面的潜在应用前景广阔，因而受到广泛关注。因此，我们急需开发具有高灵敏度、宽检测范围、以及耐用性高的柔性压力传感器。
目前市场涌现的柔性压力传感器中，以压电式、电容式与电阻式为主。通常不选用压电传感器，因为它们显示出较低的压力敏感度，并且几乎不能集成到柔性电子皮肤中。而电容式传感器容易受到外部电磁场的影响，比电阻式传感器更难制造，对于电阻式压力传感器，由于其综合的检测能力和灵活性，易于采集信号，易于制备的结构以及原材料成本低廉，因此得到了广泛的开发。本课题针对电阻式压力传感器高性能与低成本之间的矛盾以及高灵敏度与宽检测范围之间的矛盾，提出了两种制造柔性压力传感器的方法，本论文的主要研究内容如下：
(1) 基于碳化再生纤维素纤维的柔性压力传感器。首先将清洗过后的无纺布在氮气保护下置于管式炉中碳化，从而获得所需压阻材料。将多层碳化后的压阻材料堆叠成三明治状态，用铜线当做电极并用医用胶带封装，从而得到完整的柔性压力传感器，该压力传感器具有3.10 kPa-1的高灵敏度与5 Pa的低检测极限。
(2)基于双模版法的柔性压力传感器。以盐颗粒和砂纸作为制造柔性压力传感器的模板，以PDMS为柔性基底，将PDMS与多壁碳纳米管混合，将混合后的预聚物倒入底部为砂纸的培养皿中，并用盐颗粒造孔，将所得聚合物于炭黑颗粒的分散液中超声并干燥，最后用叉指电极作为传感器的引出电极并用聚氨酯薄膜封装。所得柔性压力传感器具有高灵敏度（0-30 kPa范围内58.33 kPa-1）与超宽检测范围（0-400 kPa），同时传感器具备快速响应时间 (响应时间和恢复时间分别为 3 ms 和 10 ms)等。
本论文针对传统柔性电阻式压力传感器存在的不足，制造出了具有优异性能的柔性电阻式压力传感器。不仅可以监测人体关节弯曲，甚至可以监测人体的脉搏与发声。另外，我们还设计了传感器集成的阵列电子皮肤，以识别空间压力分布和压力大小。因此该传感器在健康监测领域有着巨大应用前景。
Abstract
In recent years, with the rapid development of wearable electronic devices,electronic sensors, as one of its indispensable components, are in the focus of research at home and abroad. In the future, the development of various high-performance electronic sensors will mushroom.Compared with traditional rigid sensors,flexible pressure sensors have the characteristics of light weight, portability and high ductility. In addition, flexible pressure sensors have broad potential applications in human motion detection, electronic skin, intelligent manufacturing, and human-computer interaction. Therefore, Widespread concern.Therefore, we urgently need to develop a flexible pressure sensor with high sensitivity, wide detection range, and high durability.
Among the flexible pressure sensors emerging in the market,piezoelectric, capacitive and resistive are the main ones. Piezoelectric sensors are usually not used because they show low pressuresensitivity and can hardly be integrated into a flexible electronic skin. Capacitive sensors are susceptible to external electromagnetic fields and are more difficult to manufacture than resistive sensors. For resistive pressure sensors,due to its comprehensive detection capabilities and flexibility, easy signal collection, easy-to-prepare structure and low raw material costs, has been extensively developed. Aiming at the contradiction between high performance and low cost of resistive pressure sensor and the contradiction between high sensitivity and wide detection range, this subject proposes two methods for manufacturing flexible pressure sensors. The main research contents of this paper are as follows:
(1) Flexible pressure sensor based on carbonized regenerated cellulose fiber.First, the cleaned non-woven fabric is carbonized in a tube furnace underthe protection of nitrogen to obtain the required piezoresistive material. The multilayer carbonized piezoresistive materials are stacked into a sandwich state, copper wires are used as electrodes and medical tape encapsulated toobtain a complete flexible pressure sensor, which has a high sensitivity of 3.10 kPa-1 and a low detection limit of 5 Pa.
(2) Flexible pressure sensor based on dual template method.Salt particles and sandpaper are used as the template to manufacture the flexible pressure sensor,PDMS is used as the flexible substrate, PDMS is mixed with multi-walled carbon nanotubes,the mixed prepolymer is poured into a petri dish with sandpaper at the bottom,and salt particles are used to make Hole,the obtained polymer is sonicated and dried in a dispersion of carbon black particles, and finally the interdigital electrode is used as the lead electrode of the sensor and is encapsulated with a polyurethane film. The resulting flexible pressure sensor has high sensitivity (58.33 kPa-1 in the range of 0-30 kPa) and an ultra-wide detection range (0-400 kPa).At the same time, the sensor has a fast response time (response time and recovery time are 3 ms and 10 ms, respectively) Wait.
In this paper, aiming at the shortcomings of traditional flexible resistive pressure sensors, a flexible resistive pressure sensor with excellent performance is manufactured. It can monitor not only the bending of human joints,but also the pulse and vocalization of the human body. In addition, we also designed an array electronic skin with sensor integration to identify the spatial pressure distribution and pressure level. Therefore, the sensor has great application prospects in the field of health monitoring.
Keywords flexible pressure sensor,regenerated cellulose fiber, carbon nanotube, PDMS, carbon black
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